| 摘要 |
PURPOSE:To expand an exposable area on an exposure sample of a highly accurate and fine pattern by a method wherein a sample board which can be shifted longitudinally or laterally is provided. CONSTITUTION:The sample 4 to be tested for an X-ray exposure is placed on the sample board 2 and a section on the sample is irradiated at one exposure processing. Every time an X-ray irradiation on a section finishes, one division of the sample 4 is shifted by driving devices 5-6. For example, if the size of an exposure sample is approximately 10mm. square, the source of X-rays can be brought very close to the sample and also a masking can be performed. On the other hand, the sample board can be shifted in two or three seconds and an exposure for the whole region is finished in two or three minutes. A positioning is performed every 10mm. square and this is useful for improvement in accuracy of exposure. As a result, the area to be exposed on the exposure sample having a highly accurate and fine pattern can be expanded several times. |
