Integrated circuit capacitors

摘要

A semiconductor integrated circuit includes storage capacitors (C1,C2) which, in order to minimise the incidence of soft errors caused by alpha particle bombardment, do not form depletion layers with the substrate (4). Each capacitor comprises two electrode layers (2, 2'; 3) separated by a dielectric layer (1). The lower electrode (3) is deposited on an insulating surface layer (13) on the substrate (4) and is connected either to the substrate or to a source of potential.