| 摘要 |
PURPOSE:To improve the efficiency of the slider work of a magnetic head by combining etching with mechanical work when cutting a substrate, which has chips formed of a slider part and horizontal magnetic head, into individual chips. CONSTITUTION:At a fixed position on the surface of substrate 6, thin-film horizontal magnetic head 7 is formed and on it, photoresist 8 is bonded, exposed via photomask 9 with a pattern for the formation of a cut position and slider and processed, thereby removing photoresist 8 at groove formation part 10. Next, groove 11 is made in substrate 6 by etching and after remaining photoresist 8 is removed, substrate 6 is separated into respective chips by cutting along groove 11 as shown the chain lines through mechanical work. Here, the above-mentioned mechanical work never influences the area of a slider floating surface even if its position would shifts a little, so that the slider can be formed through relatively-rough work. |
