DEVICE FOR DRIVING CIRCULAR FACE PLATE

摘要

PURPOSE:To retain the locus of a detection point into spiral with a constant pitch interval and a tangent scanning speed constant by maintaining the peripheral speed of the locus of the detection point constant as well as detecting the rotary angle to control a rotary base into one direction movement. CONSTITUTION:A pulse motor 32 is used as a motor for driving an X table 6 and driven by a rotary angle information from an angular detector for detecting the rotary angle of a rotary base 4 so that the locus of the detecting point may become spiral with a constant pitch interval on a specimen. The position of the table 6 is calculated from the feeding mount of the table 6 to control the rotary speed of a variable speed motor 27 for driving the rotary base using the position value. Even if any disturbance occurs, it can be thus inspected without fail on the entire surface of the specimen, and it does not decelerate the peripheral speed even at the center so as to shorten the inspecting time.