发明名称 |
Process for determining the effective doping agent content of hydrogen for the production of semiconductors |
摘要 |
A process for determining the effective doping agent content of hydrogen for the production of semiconductors which comprises zone drawing a silicon rod of highest purity and having a known specific resistance, in the presence of hydrogen to be tested, subsequently redetermining the specific resistance of the silicon rod, and computing the concentration of the doping agent in the hydrogen used from the known relationship between the specific resistance and the amount of doping agent. By stepwise determination of the resistance along the longitudinal axis of the rod, the amount of doping agent built into the rod at different levels can thus be determined.
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申请公布号 |
US4210486(A) |
申请公布日期 |
1980.07.01 |
申请号 |
US19770773571 |
申请日期 |
1977.03.02 |
申请人 |
WACKER-CHEMITRONIC ELEK GRUNDSTOFFE |
发明人 |
HERZER, HEINZ;HOFER, JOHANN;SCHMIDT, DIETRICH |
分类号 |
G01N27/00;C30B13/00;C30B13/12;C30B13/28;C30B29/06;H01L21/66;(IPC1-7):B01J17/34 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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