VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON ELEKTRISCHEN BAUELEMENTEN, INSBESONDERE SCHICHTKONDENSATOREN

摘要

Electrical components which have alternate metal and polymer layers carried on a substrate are produced by fixing the substrates on a rotatable drum and rotating the drum through first and second vacuum chambers which are air-locked with respect to each other. A metal layer is applied in the first vacuum chamber by vapor deposition or sputtering and a polymer layer is provided in the second chamber by a glow discharge operation.