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发明名称
摘要
申请公布号
JPS5532056(U)
申请公布日期
1980.03.01
申请号
JP19780115108U
申请日期
1978.08.24
申请人
发明人
分类号
B65G37/00;B65G47/30;H01L21/50;H01L21/60;(IPC1-7):H01L21/60
主分类号
B65G37/00
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