Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof.,申请号EP19790101530-传众专利搜索

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发明名称	Article comprising a substrate and an overlying layer of electron beam radiation-sensitive material and process for fabrication thereof.
摘要
申请公布号	EP0005551(A2)	申请公布日期	1979.11.28
申请号	EP19790101530	申请日期	1979.05.21
申请人	WESTERN ELECTRIC COMPANY, INCORPORATED	发明人	BOWDEN, MURRAE JOHN STANLEY;FEIT, EUGENE DAVID;THOMPSON, LARRY FLACK;WILKINS, JR., CLETUS WALTER
分类号	G03F7/20;C08F12/00;C08F20/00;C08F20/32;G03C5/08;G03F7/004;G03F7/038;H01L21/027;(IPC1-7):03F7/10;03C1/68	主分类号	G03F7/20
代理机构		代理人
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