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发明名称
SELECTIVE DIFFUSION METHOD
摘要
申请公布号
JPS54102866(A)
申请公布日期
1979.08.13
申请号
JP19780009424
申请日期
1978.01.30
申请人
NIPPON ELECTRIC CO
发明人
MATSUMOTO YOSHINARI
分类号
C30B31/02;C30B31/06;H01L21/22
主分类号
C30B31/02
代理机构
代理人
主权项
地址
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