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发明名称
INPURITY DIFFUSION
摘要
申请公布号
JPS54101662(A)
申请公布日期
1979.08.10
申请号
JP19780008746
申请日期
1978.01.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKAYANAGI SHIGETOSHI;HIRAO TAKASHI;INOUE KAORU
分类号
H01L21/265;H01L21/225
主分类号
H01L21/265
代理机构
代理人
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地址
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