| 摘要 |
PURPOSE:To alarm abnormality of the surface inspector by inspecting the presence or not of the detection signal including the signal of the edge and flaw of a defect inspecting circuit. CONSTITUTION:When there is no output of a defect detection circuit FD, inhibit of gate G2 is not accomplished, hence the gate G2 produces an output after ST and causes an alarm generating circuit AG to operate. The absence of any output signal S5 of the defect detection signal FD is evidently indicative of abnormality, i.e., fault in any of light source LS, television camera CM and defect detection circuit FD. The operator then takes suitable remedy immediately by the alarm. |
