| 摘要 |
PURPOSE:To obtain a subminiature airtight and insulated terminal making use of photoengraving technique used for a vibrator, by enabling the constitution of the airtight terminal to be processed flatly. CONSTITUTION:The SiO2 film 18, vapor-deposited on metal layer 17, is made insulated and airtight to prevent the leak. Further, a thin film of Cr-Vi-Pd, vapor-deposited on the entire glass plate, is photoengraved to form vibrator support 19, electrode lead-out part 20 and junction layer 21. Metal layer 17 is formed narrower than support part 19 and lead-out part 20, layer 17 is protected from etching even if film 18 is shifted, and films 19 and 20 are overlapped with film 18. Then, cover 22 is connected to layer 21 with soft metal 23 provided to cover 22, and layer 21 provided prevents metal 23 from touching films 19 and 20. In this constitution, metal layer 17 is etched partially to increase its resistance and to eliminate its disconnection, the mask matching at the time of the formation of insulating layer 18 is simplified, and the precision of subminiaturization improves. |
