ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of satisfying requirements for temperature homogeneity and temperature controllability.SOLUTION: An electrostatic chuck comprises: a ceramic dielectric substrate which has a first main face where a processing object is placed thereon and a second main face arranged opposite to the first main face; a base plate which is arranged at a position away from the ceramic dielectric substrate and supports the same; and a heater plate which is arranged between the ceramic dielectric substrate and the base plate. The heater plate has: a first support plate which contains metal; a second support plate which also contains the metal; a heater element which is arranged between the first support plate and the second support plate and generates heat with electric current; a first resin layer which is arranged between the first support plate and the heater element; and a second resin layer which is arranged between the second support plate and the heater element.SELECTED DRAWING: Figure 5