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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53117963(A)
申请公布日期
1978.10.14
申请号
JP19770032129
申请日期
1977.03.25
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MORIYA TAKAHIKO;KIRITA KEI
分类号
H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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