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发明名称
ETCHING METHOD
摘要
申请公布号
JPS53102846(A)
申请公布日期
1978.09.07
申请号
JP19770017747
申请日期
1977.02.22
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KINOSHITA HIROSHI;TAKEUCHI HIROSHI
分类号
C23F4/00;C23F1/00;H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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