发明名称 HOLDING OF SUBSTRATE
摘要 PURPOSE:To make adhere easily the substrate for molecular beam epitaxial growth or vacuum evaporation to the substrate holder, by producing a liquid alloy having good stability by contacting plural number of metals being able to react at room temperature to form an alloy (e.g. Ga and In), and by putting this alloy between the above-mentioned substrate and the substrate holder in the form of a thin layer.
申请公布号 JPS52151679(A) 申请公布日期 1977.12.16
申请号 JP19760069442 申请日期 1976.06.14
申请人 NIPPON TELEGRAPH & TELEPHONE 发明人 MARUYAMA TOORU;AMANO TOSHIAKI;OGAWA SHIGEO;WAHO TAKAO
分类号 C30B23/02;C23C14/50;C23C14/54;C23C16/44;C23C16/458;C30B23/08 主分类号 C30B23/02
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