发明名称 |
Continuous crystal growing furnace |
摘要 |
A crystal growing furnace is provided wherein the molten material in the crucible is replaced constantly as it is withdrawn by a monitoring system which automatically maintains the level in the crucible at a desired point. A replaceable cannister system is also provided so that the level can be maintained indefinitely by replacing the cannisters.
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申请公布号 |
US4036595(A) |
申请公布日期 |
1977.07.19 |
申请号 |
US19750629609 |
申请日期 |
1975.11.06 |
申请人 |
SILTEC CORPORATION |
发明人 |
LORENZINI, ROBERT E.;IWATA, AKIYOSHI;LORENZ, KARL |
分类号 |
C30B15/02;C30B15/10;C30B15/20;H01L21/208;(IPC1-7):B01J17/18 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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