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发明名称
PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5244169(A)
申请公布日期
1977.04.06
申请号
JP19750119755
申请日期
1975.10.06
申请人
HITACHI LTD
发明人
YOKOYAMA HIROSHI
分类号
H01L21/205;H01L21/31;H01L21/314
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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