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发明名称
SPECIFIC RESISTANCE MEASURING APPARATUS
摘要
申请公布号
JPS5238883(A)
申请公布日期
1977.03.25
申请号
JP19750113771
申请日期
1975.09.22
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TAKEI SAKAE
分类号
G01R27/00;G01N27/04;G01R27/08;H01L21/66
主分类号
G01R27/00
代理机构
代理人
主权项
地址
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