APPARATUS FOR THERMAL PROCESSING OF RESIN SHEET

摘要

PURPOSE:To suppress deformation at most to four times the thickness of a base and to rapidly replace a resin sheet after thermal processing by arranging a cooler to the rear of a table for mounting the resin sheet and controlling the flow rate of a cooling medium to control the temp. of the table. CONSTITUTION:A cooling liquid 18 is cooled by a cooler 19 and the temp. in the vicinity of the resin sheet 1 of a table 3 is measured by a thermocouple 22 and the amount of the cooling liquid 18 is controlled by a cooling temp. controller 23 to hold the temp. of the table 3 to 0-5 deg.C. The resin sheet 1 is stationarily placed on the surface having groves 16 of a vacuum chuck plate 4 and a vacuum pump 5 is operated to attract the resin sheet 1 and a base 7 is cooled. The heater 10 is kept constant between the m.p. of the resin sheet 1 and the m.p. +50 deg.C by a temp. controller 11 and pressed to the projections 8 of the resin sheet 1 by a pressing device 12 and only the parts 8a of about 2/3 of the upper parts of the projections 8 are melted. Next, wires 9 are covered with the molten projections 8 and the molten projection 8 are cooled to fix the wires 9 and vacuum is released to atmospheric pressure to take out the resin sheet 1.