发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To apply PbO group glass having large chemical resistance and crack resistance, and to reduce defective withstanding voltage and inferior external appearance by using a non-doped silicon oxide film as a protective film for an element surface. CONSTITUTION:A non-doped silicon oxide film 11 is applied laminated on an SiO2 film 2 on the upper surface of a glass passivation transistor substrate 1 to which each region of an emitter and a base is formed. A hole 12 is bored in order to shape a groove for glass-passivating a P-N junction between both regions, and the groove 13 is formed by an etching liquid. Glass powder 5 is migration-attached in the groove 13 and baked, a resist film 14 is formed, glass projections 5' are removed, an opening for an electrode and the electrode are shaped, and the resist film 14 is removed.
申请公布号 JPS60102747(A) 申请公布日期 1985.06.06
申请号 JP19830209800 申请日期 1983.11.10
申请人 TOSHIBA KK 发明人 HONJIYOU SHIGERU
分类号 H01L21/316;(IPC1-7):H01L21/316 主分类号 H01L21/316
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