| 发明名称 |
CRYO PUMP FOR LENGTHENING LIFETIME THEREOF AND PROTECTING PERIPHERAL ELECTRONIC COMPONENTS |
| 摘要 |
PURPOSE: A cryo pump is provided to lengthen the lifetime thereof and protect peripheral electronic components by preventing generation of waterdrop on an outer wall thereof. CONSTITUTION: Active carbon is formed in an inside of a body. A gas supply tube(201) is connected to the body in order to supply a regenerated gas to the body. A gas exhaust tube(219) is connected to the body in order to exhaust the gas of the body. A heater is used for heating the body. The heater is operated only when the regenerated gas is supplied to the body through the gas supply tube.
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| 申请公布号 |
KR20050017148(A) |
申请公布日期 |
2005.02.22 |
| 申请号 |
KR20030055078 |
申请日期 |
2003.08.08 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
EARM, HYUN SUB;KANG, SUNG HO;KIM, YONG KWON;KIM, YOUNG DAE |
| 分类号 |
H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
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