| 摘要 |
<p>PURPOSE:To prevent the surface of a wafer from being stained with particles in manufacturing processes for a semiconductor by using a wafer storing box the inside of which is evacuated for the movement and the temporary storage of each wafer, and concurrently providing a means by which each wafer is automatically housed in and taken out of the storing box, and also is automatically carried/stored. CONSTITUTION:As for a wafer carrying/storing system in manufacturing processes for wafers, an exclusive vacuum carrier 103 is housed in a wafer storing box 106, and the inside of the box is then evacuated by a storing box cap closing means 105. The wafer storing box 106 is carried so as to be housed in a main stocker 107. Next, the wafer storing box 106 is carried in to a processing line by means of carriage among processes. Temporary storing is carried out by local stockers 108 and 109. Respective processing devices include mixedly a batch process 110 and a process for counting the number of sheets 111, also include processing means 116 which does not match a fully automatic storing cap closing means 117, however all of these are properly utilized. Each wafer which has been processed, is then forwarded to the following process.</p> |
