| 摘要 |
<p>A flexible substrate processing device which processes a flexible substrate with a roll-to-roll mode comprises: a substrate supply roll to supply the flexible substrate; substrate collection roll which is separated from the substrate supply roll and collects the flexible substrate coming out from the substrate supply roll; a processing unit which includes a stage arranged between the substrate supply roll and the substrate collection roll and passes the flexible substrate through the stage and processes the same; a gas supply unit to supply processing gas to the processing unit; and a distance control unit to support the flexible substrate on the stage as the flexible substrate is reached to the stage and control a distance between the flexible substrate and the stage so the flexible substrate passing through the stage is separated from the stage. Thus, the productivity and the quality of a product can be improved.</p> |
