| 摘要 |
PROBLEM TO BE SOLVED: To prevent a leakage voltage from being applied from a semiconductor relay to a DUT. SOLUTION: In a pin electronics part 100 of this semiconductor testing device, when a control part 150 performs OFF-control of the semiconductor relay 130 at a time other than a test time of the DUT 180, ON-control of a relay 140 for direct current measurement is performed simultaneously even when the direct current measurement is not performed. Even when a signal is outputted from a driver 110 in the OFF state of the semiconductor relay 130, and a leakage voltage is generated from an inter-output terminal capacity inside the semiconductor relay 130, the voltage is transmitted to a direct current measuring part 182 through the relay 140 for direct current measurement, thereby unexpected voltage application to the DUT 180 can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
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