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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10144638(A)
申请公布日期
1998.05.29
申请号
JP19960304361
申请日期
1996.11.15
申请人
SONY CORP
发明人
NAKAMURA MOTOAKI
分类号
H01L21/3205;H01L21/304;(IPC1-7):H01L21/304;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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