发明名称 Specimen-holding device for electron microscope
摘要 A simple specimen-holding device for use with an ultra-high resolution transmission electron microscope. The device comprises a cylindrical support member inserted in the specimen chamber of the microscope, a spherical bearing formed on the inner surface of the front end of the support member, a first pipe, a second pipe rotatably mounted inside the first pipe, a third pipe mounted in the second pipe, a specimen-holding rod, bellows between the second and third pipes, an isolation valve mounted between the first pipe and the specimen chamber, and a mechanism for opening and closing the isolation valve, utilizing rotation of the second pipe. The first pipe is swung about the spherical bearing by at least a y-motion drive means and z-motion drive means. The third pipe can be slid by an x-motion drive means. The rod is slidably mounted in the third pipe via an O-ring.
申请公布号 US5581088(A) 申请公布日期 1996.12.03
申请号 US19950545150 申请日期 1995.10.19
申请人 JEOL LTD. 发明人 KASAI, TORU
分类号 H01J37/20;(IPC1-7):H01J37/20 主分类号 H01J37/20
代理机构 代理人
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