| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating system capable of efficiently performing degassing treating for the treating capability of an object to be treated. SOLUTION: The treating system is provided with a plurality of treating devices 32A-32F for performing prescribed treating for the object to be treated W, a common carrying chamber 34 connected commonly to the plurality of the treating devices, first and second two carrying means 40, 42 for carrying the object to be treated between the treating devices provided in the common carrying chamber, buffer parts 50, 52 having at least a degassing function installed in a range where respective carrying ranges of the two carrying means are overlapped in the common carrying chamber, load locking chambers 36A, 36B capable of evacuation connected to the common carrying chamber and having at least the degassing function, an introduction side carrying chamber 38 connected to the load locking chamber, and an introduction side carrying means 130 for carrying the object to be treated between a cassette housing a plurality of the objects to be treated and the load locking chamber. Thereby degassing treating is efficiently performed for the treating capability of the object to be treated. |
