发明名称 PRODUCTION OF THIN-FILM MAGNETIC HEAD
摘要 PROBLEM TO BE SOLVED: To provide the crack of an insulating layer by distortion, etc., and to obviate the occurrence of an insulation defect by cutting the insulating layer having an apex part by ion milling to form a desired apex angle. SOLUTION: A resin is applied on a substrate 1 and is exposed and developed to the shape of a lower magnetic pole layer 2 by a mask. The part corresponding to the lower magnetic pole layer 2 board with hole by development is plated with a magnetic material and, thereafter, the resin is removed to form the lower magnetic pole layer 2. A thin gap layer 3 consisting of Al2 O3 and an insulating layer 4 are formed thereon and, further, a coil layer 5 and an insulating layer 4 are formed. The formation of the two layers, the coil layer 5 and the insulating layer 6 is repeated. An upper magnetic pole 7 is formed in the uppermost part to form the thin-film magnetic head. At the time of forming the insulating layers 4, 6 the insulating layer 4, 6 having the apex part are formed by using the Al2 O3 as a material which does not require thermosetting and are cut by ion milling to form the desired apex angleθ.
申请公布号 JPH09212821(A) 申请公布日期 1997.08.15
申请号 JP19960014914 申请日期 1996.01.31
申请人 FUJI ELELCTROCHEM CO LTD 发明人 SAWAKE TAKESHI;TACHIKAWA KAZUHIKO;EGAWA MASAHIRO
分类号 G11B5/31;(IPC1-7):G11B5/31 主分类号 G11B5/31
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