发明名称 THIN FILM CAPACITOR-EMBEDDED PRINTED CIRCUIT BOARD AND METHOD OF MANUFACTURING THE SAME
摘要 Disclosed herein is a printed circuit board with an embedded thin-film capacitor, and a method of manufacturing the same. Specifically, the present invention relates to a printed circuit board with an embedded thin-film capacitor, comprising a lower electrode formed on an insulating substrate; an amorphous paraelectric film formed on the lower electrode; a metal seed layer formed on the paraelectric film; and an upper electrode formed on the metal seed layer and having a surface roughness (Ra) of more than 300 nm; and a method of manufacturing a printed circuit board with an embedded thin-film capacitor, comprising forming a lower electrode on an insulating substrate; forming an amorphous paraelectric film on the lower electrode, using a low-temperature film formation process; forming a metal seed layer on the paraelectric film; and forming an upper electrode having a surface roughness (Ra) of more than 300 nm on the metal seed layer, using an electroplating method.
申请公布号 US2009152121(A1) 申请公布日期 2009.06.18
申请号 US20090370818 申请日期 2009.02.13
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 MOON JIN SEOK;CHUNG YUL KYO;LYOO SOO HYUN;SOHN SEUNG HYUN
分类号 C25D5/00 主分类号 C25D5/00
代理机构 代理人
主权项
地址