Process and device for determining three-dimensional structure in the submicron range

摘要

PCT No. PCT/CH96/00078 Sec. 371 Date Sep. 17, 1997 Sec. 102(e) Date Sep. 17, 1997 PCT Filed Mar. 6, 1996 PCT Pub. No. WO96/29570 PCT Pub. Date Sep. 26, 1996A device and method for defining a three-dimensional structure of an object having a submicrometer size splits a coherent electromagnetic radiation beam into two partial beams including a first partial beam and a second partial beam. The first partial beam is focused on the object. The first partial beam is reflected from or dispersed from the object to yield a first radiation directed toward a locus. The second partial beam is directed toward the locus. The first radiation and the second radiation form an electromagnetic combination in a region of the locus. Second phase values are established from the initial phase values via multiplication of the initial phase values by one or more predetermined values to provide information for generating a magnified image representative of the object.