Device for controlling temperature of an optical element

摘要

A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.

主权项

1. A system, comprising:
an optical element configured to be a component of an EUV microlithography tool; a cooling element disposed away from the optical element, the cooling element being configured to cool the optical element via radiation heat transfer; a shielding configured to prevent the cooling element from absorbing heat from a component of the system other than the optical element; and a controller configured to control a temperature of the cooling element, wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.