| 摘要 |
<p>PURPOSE:To obtain a wafer cassette capable of reducing generation of dust during handling process including transport by providing a cassette part for storing a plurality of wafers, a box for storing the cassette part and a shock absorbing means for absorbing vibration applied to the box. CONSTITUTION:A wafer cassette has a wafer storing space for storing a plurality of wafers 42 by arranging them concentrically and a cassette part 43 provided with a guide groove engaging with a part of the peripheryl of the wafer for deciding position of the wafer and a box 44 for storing the cassette part on the inwall of a body. A cassette member 43 is stored floatably in the box 44 via a shock absorbing means consisting of a plurality of coil springs and the like. Thereby, vibration transmitted to the wafer 42 stored in the cassette part 43 can be prevented by absorbing the vibration applied to the box 44 by the shock absorbing means and attenuating it before transmission to the cassette part 43 and damage of the wafer 42 and generation of dust can be prevented.</p> |
