| 发明名称 |
Oxygen scavenging in a plasma reactor |
| 摘要 |
Trace amounts of oxygen are removed from a plasma reactor by heating a filament during the times the reactor is not processing to cause the filament to react with the oxygen in the reactor, and forms an oxide of the filament material and the oxygen.
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| 申请公布号 |
US5254216(A) |
申请公布日期 |
1993.10.19 |
| 申请号 |
US19910719219 |
申请日期 |
1991.06.21 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
FRANK, JAMES G.;BARNA, GABRIEL G. |
| 分类号 |
H01L21/302;H01J37/32;H01L21/02;H01L21/3065;H01L21/3213;H05H1/46;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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