发明名称 Apparatus for vapor-phase synthesis of diamond and method for vapor-phase synthesis of diamond
摘要 PCT No. PCT/JP90/01545 Sec. 371 Date Jul. 25, 1991 Sec. 102(e) Date Jul. 25, 1991 PCT Filed Nov. 28, 1990 PCT Pub. No. WO91/08329 PCT Pub. Date Jun. 13, 1991.An apparatus for the synthesis of diamond by the vapor-phase process using a combustion flame is provided with a cover set in place in the peripheral region of a combustion burner for enveloping the combustion flame and provided, when necessary, with gas inlets. A method for the synthesis of diamond by the vapor-phase process using the apparatus described above effects the diamond deposition by forming a combustion flame for synthesis of diamond and, at the same time, varying the relative parallel positions of the combustion flame and the substrate.
申请公布号 US5273618(A) 申请公布日期 1993.12.28
申请号 US19910721549 申请日期 1991.07.25
申请人 SHOWA DENKO K.K.;MURAKAWA, MASAO;HIROSE, YOICHI 发明人 KOMAKI, KUNIO;HIROSE, YOICHI
分类号 C23C16/27;C30B25/02;C30B25/10;(IPC1-7):C30B29/04 主分类号 C23C16/27
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