发明名称 |
Apparatus for vapor-phase synthesis of diamond and method for vapor-phase synthesis of diamond |
摘要 |
PCT No. PCT/JP90/01545 Sec. 371 Date Jul. 25, 1991 Sec. 102(e) Date Jul. 25, 1991 PCT Filed Nov. 28, 1990 PCT Pub. No. WO91/08329 PCT Pub. Date Jun. 13, 1991.An apparatus for the synthesis of diamond by the vapor-phase process using a combustion flame is provided with a cover set in place in the peripheral region of a combustion burner for enveloping the combustion flame and provided, when necessary, with gas inlets. A method for the synthesis of diamond by the vapor-phase process using the apparatus described above effects the diamond deposition by forming a combustion flame for synthesis of diamond and, at the same time, varying the relative parallel positions of the combustion flame and the substrate.
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申请公布号 |
US5273618(A) |
申请公布日期 |
1993.12.28 |
申请号 |
US19910721549 |
申请日期 |
1991.07.25 |
申请人 |
SHOWA DENKO K.K.;MURAKAWA, MASAO;HIROSE, YOICHI |
发明人 |
KOMAKI, KUNIO;HIROSE, YOICHI |
分类号 |
C23C16/27;C30B25/02;C30B25/10;(IPC1-7):C30B29/04 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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