AMORPHOUS SILICON NITRIDE POWDER AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide amorphous Si3 N4 powder and its production for relatively easily producing the amorphous Si3 N4 powder in which finely graining proceeds at the time of sintering as a powdery starting material for an Si3 N4 sintered compact having superior characteristics such as strength in a medium to low temp. range. SOLUTION: A metal such as Ti or B forming nitride under Si3 N4 sintering conditions in the atmosphere of nitrogen forms a solid soln. in amorphous Si3 N4 powder. This amorphous Si3 N4 powder is produced by mixing the amorphous Si3 N4 powder with metal powder at 10-200 G acceleration. The added amt. of the metal powder is preferably 10-50 wt.% of the total amt. and the mixing time is preferably 0.1-10 hr.