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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH08330279(A)
申请公布日期
1996.12.13
申请号
JP19950155240
申请日期
1995.05.29
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
KOYAMA YOSHIHIRO;MIZOHATA YASUHIRO;HIRAE SADAO
分类号
H05H1/46;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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