| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-reliability IC testing device by using a semiconductor relay, and to provide a semiconductor integrated circuit enabling a high speed test by applying a voltage to terminals to suppress the capacity between output terminals at the off-time of the semiconductor relay. SOLUTION: A driver 1 outputs an IC test signal to a measured device 2. A comparator 8 compares the voltage level of the output signal outputted from the measured device 2 based on the IC test signal with a preset voltage value. A mechanical relay 4 is inserted between the output terminal of the driver 1, the input terminal of the comparator 8, and the terminal of the measured device 2. A DC unit 3 performs a DC test (DC current precision test) for measuring the output voltage, current applied voltage, and voltage applied current of the measured device 2. The semiconductor relay 5 and a semiconductor element relay 6 are provided between the DC unit 3 and a terminal of the measured device 2, respectively.
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