| 摘要 |
<p>A method of manufacturing a droplet jetting device, comprising the steps of:
- providing a substrate (10) with a sacrificial layer on one side thereof;
- applying an island of a mask material on the sacrificial layer and shaping the sacrificial layer into a negative mold (20) for a nozzle hole by isotropic etching around the island;
- forming a nozzle plate (22) by applying material onto the side of the substrate that carries the mold (20), so as to embed the mold in that material;
- etching away the mold (20); and
- removing material of the substrate (10) so as to form therein a feedthrough that communicates with the nozzle hole.</p> |
