发明名称 PHOTOMASK, PRODUCTION OF TFT SUBSTRATE AND PRODUCTION OF DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a photomask capable of producing a high quality display device without depending upon the positioning accuracy and the dimensional accuracy of a mask pattern. SOLUTION: In the photomask 10 for producing the display device, plural plotting regions and plotting joint parts 14 formed between adjacent plotting regions in plural plotting regions are defined on the surface and a pattern 4 is formed on at least one of the plotting regions. The ratio of a pitch, at which the pattern 4 is formed, to a pitch of the plotting joint part 14 on the photomask 10 is an integer ratio, in which the least common multiple of the pitch of the pattern and the pitch of the plotting connecting part 14 becomes <=1 mm.
申请公布号 JP2000250197(A) 申请公布日期 2000.09.14
申请号 JP19990054805 申请日期 1999.03.02
申请人 SHARP CORP 发明人 YAMADA SHIGEYUKI;OKETANI HIROI;SHIMADA YOSHIHIRO
分类号 G09F9/30;G02F1/136;G02F1/1368;G03F1/68;G03F1/76;G03F7/20 主分类号 G09F9/30
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