| 摘要 |
PURPOSE:To improve the crystallinity, optical properties, etc., of a lithium niobate single crystal thin film by forming a lithium niobate single crystal thin film on a lithium niobate single crystal substrate interposing an intermediate layer composed of a single crystal thin film therebetween. CONSTITUTION:An intermediate layer composed of a single crystal thin film is formed on a lithium niobate single crystal substrate. The intermediate layer is preferably a lithium tantalate single crystal thin film and its thickness is preferably 0.2-30mum. A lithium niobate single crystal thin film is formed on the intermediate layer by liquid-phase epitaxial growth process, etc. The lattice of the lithium niobate single crystal thin film is preferably matched with that of the intermediate layer. A lithium niobate single crystal thin film having low lattice strain and crystal defect content, free from microcrack and exhibiting excellent optical properties can be produced by using an easily available lithium niobate single crystal as a substrate. |
