INSPECTION APPARATUS OF BONDING CONDITION OF PELLET AND ITS INSPECTION METHOD

摘要

PURPOSE: An apparatus for inspecting a bonding state of a pallet and an inspecting method are provided to reduce the manufacturing cost and fault rate by automatically inspecting the bonding state of the pallet. CONSTITUTION: A die bonder(1) comprises a fixing section for fixing a lead frame(40) to a predetermined position, a robot(3) which is movable in the X-Y axis directions, and a header section(5) which is mounted on the robot(3) to bond a pallet to the lead frame(40). An observing section(7) is fixed adjacent to the header section(5) so as to observe the bonding state between the lead frame(40) and the pallet. A detecting section detects the bonding state of the pallet based on an observed signal supplied from the observing section(7). A system control section is provided to control the operation of the robot(3) and the header section(5). The system control section includes a memory part and a comparing part.