| 摘要 |
PROBLEM TO BE SOLVED: To obtain a static pressure air bearing eliminated in the need of controlling air permeating quantity by forming a carbon material having equal to or below a specific value of the dispersion of air passing quantity in the same block under a specific air pressure. SOLUTION: The carbon material has <=20 cm<3> /cm<2> /min dispersion of the air passing quantity in the same block under 0.469 MPa air pressure. The carbon material is obtained lay forming a kneaded material composed of 40-70 wt.% raw material aggregate powder containing >=80 wt.% particle having 1-60 μm particle diameter and 30-60 wt.% binder, mixing 1-20 wt.% organic material powder having 5-20 μmaverage particle diameter such as a resin bead having <=20% fixed carbon ratio, a pulp powder or the like with a pulverized powder obtained by pulverizing the kneaded material and having 50-100 μm average particle diameter to make a molding powder and firing a molding press molded under 600-1400 kg/cm<2> pressure in a reducing atmosphere at 800-1,000 deg.C for 300-500 hr. As the raw material aggregate, a coke powder, a graphite powder, a ccbon black or the like is used and as the binder, tar, pitch or the like is used. |
