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发明名称
Verfahren und Gerät zur Erzeugung eines flachen Plasmas mittels magnetischer Kupplung
摘要
申请公布号
DE69031820(D1)
申请公布日期
1998.01.29
申请号
DE19906031820
申请日期
1990.08.11
申请人
LAM RESEARCH CORP., FREMONT, CALIF., US
发明人
OGLE, JOHN SELDON, MILPITAS, CA 95035, US
分类号
C23C16/505;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46;(IPC1-7):H01J37/32
主分类号
C23C16/505
代理机构
代理人
主权项
地址
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