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发明名称
TARGET FOR SPUTTERING
摘要
申请公布号
JPH0586459(A)
申请公布日期
1993.04.06
申请号
JP19910118891
申请日期
1991.05.23
申请人
MITSUBISHI MATERIALS CORP
发明人
ISHII TOSHINORI;KINOSHITA MAKOTO;KISHIDA KUNIO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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