METHOD OF CREATING MASK LAYOUT IMAGE AND IMAGING SYSTEM

摘要

Provided are a method of creating a mask layout image from a target image, a computer readable storage medium having stored thereon a computer program for executing the method, and an imaging system. The method includes reading all or a part of a target image to be transcribed on a substrate; defining a mask data set including a plurality of pixels having a predetermined transmittance characteristic; defining a weighting function having a non-zero value within a critical range; defining a convolution kernel determined by an illumination meter; and creating the mask layout image that minimizes an image fitting function by using the weighting function and the convolution kernel.