| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaned air feeder and a treatment device capable of stabilizing performance of an air filter and prolonging its lifetime. <P>SOLUTION: This air cleaner is provided with a blower 16, an ULPA filter 17b or a HEPA filter arranged on the downstream of the blower 16 for eliminating particles in gas, and a rectifying member 18 arranged on the upstream or downstream of the blower 16 for compensating an uneven in-plane air speed distribution by the blower 16 into an even in-pane air speed distribution. The rectifying member 18 is provided with an uneven in-plane opening ratio, and an area with the low opening ratio in the rectifying member corresponds to an area with a high air speed of the blower 16. <P>COPYRIGHT: (C)2004,JPO |
