发明名称 |
Heat treatment method and heat treatment apparatus |
摘要 |
When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.
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申请公布号 |
US2002110769(A1) |
申请公布日期 |
2002.08.15 |
申请号 |
US20020106120 |
申请日期 |
2002.03.27 |
申请人 |
YOSHIDA SEIICHI;TANAHASHI TAKASHI;ONODERA AKIRA;AKIMOTO MOTOKI |
发明人 |
YOSHIDA SEIICHI;TANAHASHI TAKASHI;ONODERA AKIRA;AKIMOTO MOTOKI |
分类号 |
F27B1/20;C23C16/44;C23C16/54;C30B31/18;F27B1/26;F27B1/28;F27D7/02;F27D17/00;F27D19/00;H01L21/00;H01L21/205;H01L21/22;H01L21/324;(IPC1-7):F27B17/00 |
主分类号 |
F27B1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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