FLOW PASSAGE STRUCTURE, INTAKE/EXHAUST MEMBER, AND PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flow passage structure which fluid is more equally sucked in or discharged from.SOLUTION: A flow passage structure according to one embodiment includes a member. A plurality of first apertures, a plurality of second apertures, a flow passage, and a plurality of merging/branching units are provided in the member. The flow passage connects the plurality of first apertures with the plurality of second apertures. Each of the merging/branching units is provided in the flow passage and includes a plurality of first parts each having individual first ends connected with each other and a plurality of second parts each of which has individual second ends connected with each other and is closer to a second apertures than the first parts are in a path between the first aperture and the second aperture. The first ends and the second ends are connected in each of the merging/branching units.SELECTED DRAWING: Figure 2