发明名称 |
Stable conductive elements for direct exposure to reactive environments |
摘要 |
Improved conductive elements for direct exposure to reactive ambients. The conductive articles are fabricated from bodies of alpha silicon carbide comprising a minor fraction of homogeneously dispersed conductive particles. The bodies may have a sufficiently low electrical resistivity so that they may be used as heaters for direct contact with workpieces at high temperatures.
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申请公布号 |
US4633051(A) |
申请公布日期 |
1986.12.30 |
申请号 |
US19830554978 |
申请日期 |
1983.11.23 |
申请人 |
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC. |
发明人 |
OLSON, DONALD M. |
分类号 |
C04B35/565;C23C16/32;C23C16/46;C23F4/00;C30B25/12;H01B1/04;H05B3/62;(IPC1-7):H05B6/10 |
主分类号 |
C04B35/565 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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