发明名称 Stable conductive elements for direct exposure to reactive environments
摘要 Improved conductive elements for direct exposure to reactive ambients. The conductive articles are fabricated from bodies of alpha silicon carbide comprising a minor fraction of homogeneously dispersed conductive particles. The bodies may have a sufficiently low electrical resistivity so that they may be used as heaters for direct contact with workpieces at high temperatures.
申请公布号 US4633051(A) 申请公布日期 1986.12.30
申请号 US19830554978 申请日期 1983.11.23
申请人 ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC. 发明人 OLSON, DONALD M.
分类号 C04B35/565;C23C16/32;C23C16/46;C23F4/00;C30B25/12;H01B1/04;H05B3/62;(IPC1-7):H05B6/10 主分类号 C04B35/565
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